On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach

- Ruppert, Michael G., Fowler, Anthony G., Maroufi, Mohammad, Moheimani, S. O. Reza

Feedback-controlled MEMS force sensor for characterization of microcantilevers

- Moore, Steven Ian, Coskun, M. Bulut, Alan, Tuncay, Neild, Adrian, Moheimani, S. O. R.

Force-controlled MEMS rotary microgripper

- Piriyanont, Busara, Fowler, Anthony George, Moheimani, S. O. Reza

MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design

- Maroufi, Mohammad, Fowler, Anthony G., Reza Moheimani, S. O.

Parallel averaging for thermal noise mitigation in MEMS electrothermal displacement sensors

- Mohammadi, Ali, Moheimani, S. O. R., Yuce, Mehmet Rasit

Tilted beam piezoresistive displacement sensor: design, modeling, and characterization

- Maroufi, Mohammad, Bazaei, Ali, Mohammadi, Ali, Moheimani, S. O. Reza

A feedback controlled MEMS nanopositioner for on-chip high-speed AFM

- Mohammadi, Ali, Fowler, Anthony G., Yong, Yuen K., Moheimani, S. O. Reza

An omnidirectional MEMS ultrasonic energy harvester for implanted devices

- Fowler, Anthony G., Moheimani, S. O. R., Behrens, Sam

Displacement measurement with a self-sensing MEMS electrostatic drive

- Moore, Steven I., Moheimani, S. O. Reza

Displacement sensing with silicon flexures in MEMS nanopositioners

- Bazaei, Ali, Maroufi, Mohammad, Mohammadi, Ali, Moheimani, S. O. R.

MEMS rotary microgripper with integrated electrothermal force sensor

- Piriyanont, Busara, Moheimani, S. O. Reza

Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing

- Fowler, Anthony G., Bazaei, Ali, Moheimani, S. O. Reza

A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM

- Fowler, A. G., Laskovski, A. N., Hammond, A. C., Moheimani, S. O. R.

A low-flicker-noise MEMS electrothermal displacement sensing technique

- Mohammadi, A., Yuce, M. R., Moheimani, S. O. R.

Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

- Zhu, Yong, Bazaei, Ali, Moheimani, S. O. Reza, Yuce, Mehmet Rasit

Q control of an atomic force microscope microcantilever: a sensorless approach

- Fairbairn, Matthew W., Moheimani, S. O. Reza, Fleming, Andrew J.